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Atomic-Layer-Deposition Growth Of An Ultrathin HfO2 Film On, 45% OFF
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Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma

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Figure 13 from Atomic Layer Deposition of HfO2 Films Using TDMAH and ...
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Akihiro Nishida on LinkedIn: Atomic Layer Deposition of HfO2 Films Using…
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Figure 2 from Atomic Layer Deposition of HfO2 Films Using TDMAH and ...

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